WAVELENGTH VARIABLE INTERFERENCE FILTER, OPTICAL FILTER MODULE, OPTICAL ANALYZER AND MANUFACTURING METHOD OF WAVELENGTH VARIABLE INTERFERENCE FILTER

摘要

PROBLEM TO BE SOLVED: To provide a wavelength variable interference filter that is less charged.;SOLUTION: A wavelength variable interference filter comprises: a fixed substrate 50; a movable substrate 60 that is opposite to the fixed substrate 50 and is displaceable with respect to the fixed substrate 50; a first reflecting film 53 provided at a first recessed portion 72 formed on a surface of the fixed substrate 50 opposite to the movable substrate 60; a second reflecting film 63 that is provided on the movable substrate 60 and is opposite to the first reflecting film 53 via a gap; a first electrode 54 provided at the first recessed portion 72 of the surface of the fixed substrate 50 opposite to the movable substrate 60; and a second electrode 64 that is provided on the movable substrate 60 and is opposite to the first electrode 54. A DLC film 56 having conductivity is formed on an under-layer of the first reflecting film 53 in the fixed substrate 50. A DLC film 66 having the conductivity is continuously formed on under-layers of the second electrode 64 and the second reflecting film 63 in the movable substrate 60.;COPYRIGHT: (C)2013,JPO&INPIT