Fine site analysis equipment and fine site analysis method using a focused ion beam

摘要

PROBLEM TO BE SOLVED: To provide a fine region analyzer using focused ion beams capable of simply and accurately reproducing the optimum positional relationship of a focused ion beam irradiation axis, an electronic beam irradiation axis, an axis of a secondary particle take-in port of the analyzer and a sample surface with each other when a sample is exchanged.SOLUTION: In the fine region analyzer using focused ion beams, a laser beam 9a is irradiated to a surface 3a of a sample 3 through a window plate 8 of the analyzer 5 arranged in the normal of the sample surface and through a secondary particle take-in port 5a of the analyzer 5. A light receiver 7 is arranged so that intensity and position of the reflected laser beam 9b become the optimum, and this position is used as a reference position. When the sample is exchanged, posture of the sample 3 or the like is corrected so as to reproduce the reference position, while observing responses of the light receiver 7.