You store the coordinate of the observation dot which while turning to the direction which parallels to the said plane surface section

摘要

PROBLEM TO BE SOLVED: To provide a rotation center searching method and a rotation center searching system for specifying a rotation center position of a sample pedestal.;SOLUTION: A preset observation point 10 is provided on a plane part 42 of the sample pedestal 41 having the plane part 42 for fixing a sample 7 as an object for observation. While the sample pedestal 41 is rotated in a direction along the plane part 42, a coordinate at each angle of the observation point 10 is memorized. A Fig.11 is drawn based on the memorized coordinates. A rotation center in the plane part 42 of the sample pedestal 41 is specified from points inside the drawn Fig.11.;COPYRIGHT: (C)2011,JPO&INPIT