WAFER TRANSFER DEVICE, SOLAR CELL MANUFACTURING DEVICE, WAFER TRANSFER METHOD, CONTROL PROGRAM AND RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To provide a wafer transfer device capable of transferring wafers with individually different thicknesses without breakage.;SOLUTION: A wafer transferring device 1 according to the present invention comprises: a holding part 4 holding a wafer 2; a movement control part 71 controlling movement of the holding part 4; a holding control part 72 controlling holding of the wafer 2 with the holding part 4; and a determination part 73 for determining whether a distance in a perpendicular direction to an upper face of a tray 3 at a lower end of the wafer 2 is a first distance or not.;COPYRIGHT: (C)2013,JPO&INPIT