Observation object thing alignment method and observation object thing array apparatus

摘要

PPROBLEM TO BE SOLVED: To provide a method and device for aligning a plurality of observation objects arranged in a rotating direction for ready display through an electron microscope and for ready confirmation of deviation of a shape obtained from results of length measurement of the plurality of observation objects from a reference value. PSOLUTION: The method includes the steps of designating the positions of the observation objects arranged in the rotating direction, calculating the angle of rotation θ and the radius of rotation r based on the designated positions of the observation objects, generating enlarged images by moving a stage and irradiating the objects with electron rays to detect and amplify emitted, reflected, absorbed or transmitted electrons, rotating and aligning the enlarged images based on the calculated angle of rotation θ and radius of rotation r of each observation object corresponding to the generated enlarged image and displaying the aligned enlarged images on a screen and displaying a mark indicative of the angle of rotation θ, the radius of rotation r and the actual size of each object so as to correspond to each enlarged image. PCOPYRIGHT: (C)2010,JPO&INPIT