METHOD FOR DETECTING CRACK OF SUBSTRATE, AND METHOD FOR OPERATING ION BEAM IRRADIATION DEVICE BASED ON METHOD FOR DETECTING CRACK OF SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To inexpensively detect crack of a substrate over a wide range with a simple structure in an ion beam irradiation device.;SOLUTION: An ion beam irradiation device 1 comprises: a substrate support member 9 which has one or more openings on a face opposing to a rear face of a substrate 8; a substrate drive mechanism which drives the substrate support member 9 having the substrate 8 mounted thereon, and transfers the substrate 8 to an irradiated region in which the substrate 8 is irradiated with at least some of ion beams 3 and to a non-irradiated region in which the substrate 8 is not irradiated with the ion beams 3; and a beam current measuring instrument 11 arranged at a position to be irradiated with the ion beams 3 on the downstream side of the substrate 8. The ion beam irradiation device 1 detects the presence or absence of the crack of the substrate based on a measured value of the beam current measured by the beam current measuring instrument 11 when the substrate 8 is transferred into the irradiated region.;COPYRIGHT: (C)2013,JPO&INPIT