P To remove a deposit adhered to a cleaning object surface at low cost in a low-pressure chamber which is kept at an atmospheric pressure lower than the outside atmospheric pressure. PSOLUTION: The method for removing a deposit includes: compressing and discharging air which is taken inside the low-pressure chamber lower in atmospheric pressure than the outside atmospheric pressure by a compressor installed in the low-pressure chamber; thereby injecting DRY ice particles to the cleaning object surface in the low-pressure chamber; and removing the deposit adhered to the cleaning object surface by the collision energy by the injection. The air quantity to be taken per unit time by the compressor is substantially equalized to the air quantity to be discharged per unit time by the compressor. PCOPYRIGHT: (C)2012 and JPO& INPIT
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