Substituted benzimidazole ring-containing bridged alicyclic compounds N-, N- substituted benzimidazole ring-containing polymer thin film and manufacturing method thereof

摘要

PROBLEM TO BE SOLVED: To provide an N-substituted benzimidazole ring-containing bridged alicyclic compound capable of forming a thin film such as an insulation film having high heat resistance, a low relative permittivity, and low hygroscopicity.;SOLUTION: The N-substituted benzimidazole ring-containing bridged alicyclic compound is represented by formula (1) (wherein Z is a bridged alicyclic skeleton; Y¹ is a single bond or a divalent organic group; Y² is a single bond or a di- or tri-valent organic group; X is a reactive functional group; R^a is hydrogen or a hydrocarbon group; and A is an N-substituted benzimidazole group).;COPYRIGHT: (C)2009,JPO&INPIT