Production method of ion diffusion preventing film, substrate and a liquid crystal display cell with ion diffusion preventing film

摘要

PROBLEM TO BE SOLVED: To provide an ion diffusion preventing film which excels in adhesiveness with a glass base material, heat resistance of the film, degassing characteristics of the film and film strength, and the like, and also excels in ion diffusion prevention performance.;SOLUTION: The manufacturing method of the ion diffusion preventing film comprises: (a) a process of preparing coating liquid, containing a silicon compound obtained by hydrolyzing an organosilicon compound indicated by general formula (I), or the like, under the presence of tetraalkylammonium hydroxide (TAAOH); (b) a process of applying the coating liquid onto the glass base material; (c) a process of drying a coating film at a temperature range of 25 to 350°C; (d) and a process (water heat treatment process) of heating the coating film under the temperature condition of 105 to 450°C under the presence of steam. The general formula (I) is X_nSi(OR)_4-n, and here, in the formula, X indicates a hydrogen atom, a fluorine atom, or an alkyl group, a fluorine-substiuted alkyl group, an aryl group or a vinyl group of carbon number 1-8, and R indicates the hydrogen atom or the alkyl group, aryl group or vinyl group of carbon number 1-8.;COPYRIGHT: (C)2009,JPO&INPIT