Method of calibration spectral width measuring instrument, spectral width instrument calibration equipment, narrow-band laser apparatus, exposure apparatus, and method of manufacturing an electronic device

摘要

PROBLEM TO BE SOLVED: To provide a calibration method of spectral width measuring equipment capable of always or periodically determining whether calibration of the spectral width measuring equipment is required.;SOLUTION: The calibration method of the spectral width measuring equipment for monitoring a spectral width of light irradiated from a laser light source includes: a first step (S13) of shifting the center wavelength of a spectrum of the light by a predetermined amount based on a measurement value measured by a center wavelength measuring unit for measuring the center wavelength of the spectrum of the light; a second step (S15) of measuring a shift amount of the spectrum of the light based on the shift of the center wavelength of the spectrum of the light in the first step by the spectral width measuring unit; and a third step (S16) of determining whether calibration of the spectral width measuring equipment is required based on the predetermined amount of shift of the center wavelength of the spectrum of the light in the first step and the shift amount of the spectrum of the light measured in the second step.;COPYRIGHT: (C)2010,JPO&INPIT