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In the optical component supporting structure and the optical component supporting structure which has with the production

机译:在光学部件支撑结构和具有生产性的光学部件支撑结构中

摘要

The optical element retainer (29), the lens (28) the periodic damping board of the annular condition which covers the peripheral side part (41) with, the connected component which consists of the damping alloy which in state of non contact is locked on the framework body the lens (28) vis-a-vis the surface (42) with it has that periodic damping board. The squeeze film damper is formed the periodic damping board (41) with, that periodic damping board and the lens (28) due to with the nitrogen gas which exists inside opening C where it was formed with the surface.
机译:光学元件保持器(29),透镜(28)以覆盖外周侧部(41)的环状的周期性的减震板,与由非接触状态的减震合金构成的连接部件被锁定。框架(28)相对于表面(42)具有周期性的阻尼板。挤压膜阻尼器是由周期性阻尼板(41)和周期性阻尼板(28)形成的,该周期性阻尼板(41)是由于存在于开口C内的氮气而在表面形成的。

著录项

  • 公开/公告号JP5251869B2

    专利类型

  • 公开/公告日2013-07-31

    原文格式PDF

  • 申请/专利权人 株式会社ニコン;

    申请/专利号JP20090511870

  • 发明设计人 新井 洋一;

    申请日2008-04-21

  • 分类号G02B7/02;G02B7/00;H01L21/027;

  • 国家 JP

  • 入库时间 2022-08-21 16:56:05

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