The surface form measurement equipment, surface form measuring method

摘要

PROBLEM TO BE SOLVED: To realize a high-speed light section line extracting process in a profile measurement using a mobile light-sectioning method, even in the case that an element being comparatively low in arithmetic capacity is used therefor, and to avoid any false extraction of the light section line due to influences of disturbance.;SOLUTION: In the method, a light source of sheet light emitted from a moving object is blinked, and a photographing timing of a camera is synchronized with the blink of the light source, and then about data of two or more photographed images obtained in response to two or more operations of blinking the light source, integrated difference image data are computed by integrating two or more on-light source photographed images and reducing two or more off-light source photographed images (S1-S10), and then about the integrated difference image data, an image of the light section line is extracted from an object area to be extracted which is set in accordance with an extraction position of a past light section line (S12), and if above extraction can not be carried out, the image of the light section line is extracted about another image area (S14).;COPYRIGHT: (C)2009,JPO&INPIT