Being purity evaluation method in the wafer transport

摘要

PROBLEM TO BE SOLVED: To improve at a low cost the evaluation efficiency of cleanliness resulting from dust in a wafer-transfer system installed between a semiconductor production device and a wafer carrier to transfer a wafer into the semiconductor production device from the wafer carrier.;SOLUTION: One end of the wafer carrier is opened, and the wafer carrier is made to communicate with the wafer-transfer system. Dust in the wafer-transfer system is sucked through the wafer carrier to measure the concentration of dust. Cleanliness in the wafer-transfer system is evaluated from the measured concentration of dust.;COPYRIGHT: (C)2009,JPO&INPIT