Distance meter, distance measuring method and optical three-dimensional shape measuring machine

摘要

PROBLEM TO BE SOLVED: To provide a range finder and a range finding method capable of measuring a long distance highly accurately in a short time.;SOLUTION: An interference signal acquired by detecting by a reference light detector 3, interference light S₃ between reference light S₁ emitted from a first light source 1 and irradiated onto a reference surface 4 and measuring light S₂ emitted from a second light source 2 and irradiated onto a measuring surface 6, and an interference signal acquired by detecting by a measuring light detector 6, interference light S₄ between reference light S₁' reflected by the reference surface 4 and measuring light S₂' reflected by the measuring surface 5, are supplied to a signal processing part 7. Then, a difference between a distance to the reference surface and a distance to the measuring surface is determined from the velocity of light and a refractive index in a measured wavelength based on a time difference between the interference signal acquired by detecting the interference light S₃ and the interference signal acquired by detecting the interference light S₄ by the signal processing part 7.;COPYRIGHT: (C)2010,JPO&INPIT