The method of measuring angular velocity the method of forming the picture the piezoelectric body membrane, making use of the ink jet head and the ink jet head, making use of the angular velocity sensor and the angular velocity sensor and the generation of electricity method null of using the piezoelectric generation of electricity element and the piezoelectric generation of electricity

摘要

The object of the present invention is to provide a method of manufacturing the piezoelectric film and includes a lead-free ferroelectric material having a high piezoelectric performance identical to the PZT and low dielectric loss. Piezoelectric film of the present invention, 0.51 ≦ y ≦ 0.62 and (0.30 ≦ x ≦ 0.46 _{3-layer (Na x} Bi _{y) TiO 0.5x} + 1.5y + 2 -BaTiO having a (111) orientation I comprises a).