Being the temperature profile analysis system in order to analyze the temperature profile which shows the time change of the temperature which

摘要

PROBLEM TO BE SOLVED: To accurately and easily match a time on a temperature profile with a position on a conveyance passage.;SOLUTION: The temperature profile analysis system 100 is used for analyzing a temperature profile showing time variation in temperature measured by a temperature sensor 51 attached to a substrate 50 conveyed on the conveyance passage of the reflow device 30. The temperature profile analysis system 100 includes a temperature variation device 10 for temporarily varying the temperature measured by the temperature sensor 51 attached to the substrate 50 at a reference position on the conveyance passage, and a temperature profile analysis device 20. The temperature profile analyzer 20 includes a reference time detection part 22 for detecting, as a reference time, the time on the temperature profile when a measuring point passes the reference position based on the time variation in temperature indicated by the temperature profile, and a temperature profile analysis part 23 for matching the position on the conveyance passage with the time on the temperature profile based on the distance along the conveyance passage with reference position using the reference time and conveying speed.;COPYRIGHT: (C)2011,JPO&INPIT