Spectroscopy and spectroscopic methods of ion energy

摘要

PPROBLEM TO BE SOLVED: To provide a spectroscopic method and apparatus for an ion energy, capable of measuring a concentration distribution of an intended light element sensitively and precisely in the depth direction of an object to be measured, with a low incident ion energy of 1 MeV or less by using an incident ion heavier than He. PSOLUTION: In the spectroscopic method for the ion energy, which measures an energy spectrum of ions scattering or recoiling in an operation of irradiating the object to be measured with an ion beam by using a deflecting electromagnet and an ion detector, the ion beam is generated by employing the ion of an element having a mass larger than that of an element being the spectroscopic object, and a deflecting electrode is disposed on the deflecting electromagnet output side in order to separate the scattering or recoiling ions by bending their orbits, and an ion separating thin film is disposed in front of the ion detector in order to separate and sort out ions entering the ion detector. Accordingly, the concentration distribution of the light element can be measured sensitively and precisely in a zone of the low incident ion energy of 1 MeV or less. PCOPYRIGHT: (C)2010,JPO&INPIT