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Method for microfabrication of cyano-bridged metal complex and apparatus for microfabrication of cyano-bridged metal complex

机译:氰基桥联金属配合物的微细加工方法和装置

摘要

PPROBLEM TO BE SOLVED: To microprocess a cyano crosslinked metal complex with an easy method. PSOLUTION: An apparatus (1) for microprocessing a cyano crosslinked metal complex includes: a sample (4), which is formed on the surface of a substrate and made of a cyano crosslinked metal complex; a sample moving device (2b), which holds and moves the sample (4); a laser beam source (2c), which irradiates the sample (4) with a femtosecond laser beam, whose pulse width is in order of femtosecond, with energy intensity stronger than a preset threshold; and a controller (3) having a processing position controlling means (C2), which moves a to-be-processed position (6) of the sample (4) to an irradiation position (6) of the femtosecond laser beam by controlling the sample moving device (2b). PCOPYRIGHT: (C)2010,JPO&INPIT
机译:

要解决的问题:用一种简便的方法对氰基交联的金属络合物进行微处理。

解决方案:用于对氰基交联的金属络合物进行微处理的设备(1)包括:样品(4),其形成在基材的表面上并且由氰基交联的金属络合物制成;样品移动装置(2b),其保持并移动样品(4);激光束源(2c),以脉冲强度为飞秒级的飞秒激光束照射样品(4),其能量强度大于预设阈值;控制器(3)具有处理位置控制装置(C2),该处理位置控制装置(C2)通过控制样品,将样品(4)的待处理位置(6)移动到飞秒激光束的照射位置(6)。移动装置(2b)。

版权:(C)2010,日本特许厅&INPIT

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