Swirl flow forming body and non-contact transfer device

摘要

The present invention provides a swirl flow forming body and a non-contact conveyance device capable of reducing the manufacturing cost of a non-contact conveyance device and preventing a decrease in the flying height accuracy of an object to be conveyed. SOLUTION: A bowl-shaped main body 1a having a circular hole 1b opened on the surface side, a fluid jet 1k opened on an inner surface forming a hole in the main body, and an outer surface of the main body. A swirling flow forming body 1 that includes a fluid intake port 11 that communicates with the fluid spout, and generates an upward swirling flow toward the surface away from the surface of the main body by ejecting fluid from the fluid spout. Two or more swirl flow forming bodies 4 that generate a swirl flow in a direction opposite to that in a plan view and two or more swirl flow forming bodies 4 can be arranged on the transport surface 2a of the base body 2 to constitute a non-contact transport device. The formed body can be accommodated in a recess (accommodating portion 2b) formed on the transport surface of the substrate. [Selection] Figure 1