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In the peripheral surface defective method of detection of the disk and

机译:在外围表面有缺陷的磁盘的检测方法和

摘要

PROBLEM TO BE SOLVED: To provide a method and device for detecting a peripheral surface of a disk capable of detecting highly accurately an outer peripheral defect such as a chuck impression, a flaw or a chip remaining when chucking a disk substrate, almost without detecting foreign matter which is one of defects.;SOLUTION: Regularly reflected light of light incident at an angle in the range of 45°±5° with respect to the surface of a chamfer part is received by a photodetector through a diaphragm, and thereby decline of a level of a light receiving signal of foreign matter generating much scattered light is suppressed small, similarly to a noise, and a level of a light receiving signal of a flaw or the like caused by the chuck impression is lowered greatly, to thereby enlarge a level difference between each detection signal of the foreign matter and the flaw. Then, fluctuation of a signal reference level of the light receiving signal caused by deflection in the vertical direction of a disk outer circumferential surface generated by rotation of the disk is suppressed, or the fluctuation is canceled. Hereby, a detection signal of the outer peripheral defect having a greatly reduced level in the light receiving signal can be acquired easily.;COPYRIGHT: (C)2008,JPO&INPIT
机译:解决的问题:提供一种用于检测盘的外周表面的方法和装置,该方法和装置能够高精度地检测诸如在卡紧盘基板时残留的卡盘压痕,缺陷或碎屑之类的外周缺陷,而几乎不会检测到异物。解决方案:以45°至±5°范围内的角度入射的光的正反射光会成为缺陷之一。相对于倒角部分的表面,光检测器通过光阑接收到斜面部分的表面,从而与噪声类似,抑制了产生大量散射光的异物的光接收信号的电平减小,并且噪声的电平减小。由卡盘压痕引起的缺陷等的受光信号大大降低,从而增大了异物的每个检测信号与缺陷之间的电平差。然后,抑制了由于盘的旋转而在盘外周面的垂直方向上的挠曲所引起的光接收信号的信号参考电平的波动,或者抵消了该波动。从而,可以容易地获得在光接收信号中具有大大降低的电平的外围缺陷的检测信号。;版权所有:(C)2008,JPO&INPIT

著录项

  • 公开/公告号JP5153270B2

    专利类型

  • 公开/公告日2013-02-27

    原文格式PDF

  • 申请/专利权人 株式会社日立ハイテクノロジーズ;

    申请/专利号JP20070233939

  • 发明设计人 石黒 隆之;芹川 滋;

    申请日2007-09-10

  • 分类号G01N21/95;G01B11/30;G11B5/00;G11B5/84;G11B23/00;

  • 国家 JP

  • 入库时间 2022-08-21 16:53:53

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