Waste material recycling apparatus, recycling method using the same, and metal, metal compound, and substrate obtained by the method

摘要

PPROBLEM TO BE SOLVED: To provide an effective recycling device and recycling method, which recover a valuable resource containing rare metals such as indium from waste material containing a transparent conductive film, and enable a recycling as a material of the same manufactured article. PSOLUTION: The invention relates to the recycling device of the waste material, provided with a plasma generating device as a means plasma-treating the waste material containing the transparent conductive film, the recycling method of the waste material, including the process of plasma-treating the waste material containing the transparent conductive film using the recycling device, and metals, metal compounds, and base material obtained by the concerned method. PCOPYRIGHT: (C)2009,JPO&INPIT