Thermal property evaluation apparatus, thermal properties evaluation measurement method

摘要

PROBLEM TO BE SOLVED: To highly accurately measure temperature changes caused by irradiation with heating light in a very small section to be measured (front surface) of a sample even having a back surface in a state of no transmission of light in the measurement of thermophysical property evaluation.;SOLUTION: In a measuring method for thermophysical property evaluation, principal light B0 made of pulse light intermittent at a prescribed period is branched into heating light B1 and detection light B2. The intensity of the heating light B1 is modulated at a first frequency F1, and the intensity of the detection light B2 is modulated at a second frequency F2 different from the first frequency F1. An optical path length adjusting mechanism 8 generates a time difference Δtp in the arrival of the pulse light at a section to be measured 20a between the heating light B1 and the detection light B2. A photo-detector 14 receives detection light B2' reflected at the section to be measured 20a to detect the intensity of light reception. A detector 15 detects a frequency component of a frequency (F1+F2) or |F1-F2| of its detection signals.;COPYRIGHT: (C)2009,JPO&INPIT