In the alignment device which turns notch or orihura of the alignment mannered null semiconductor wafer of the alignment device of the wafer,

摘要

PROBLEM TO BE SOLVED: To make an aligner compact and shorten alignment time in the aligner that detects a notch in a wafer and performs angular alignment.;SOLUTION: The aligner for wafer includes: a wafer placement portion 7 to place a semiconductor wafer 3 wherein an ID 11 marked at the predetermined position to a notch or an orientation flat 15 is marked on its front or rear surface; a rotation mechanism for rotating the wafer placement portion 7; a rotating position detection means to detect the rotating position of the wafer placement portion 7, and an ID reader 10 to read the ID 11. The rotating position of the wafer placement portion 7 where the ID reader 10 reads the ID 11 is acquired from the rotating position detection means, and the notch or the orientation flat 15 is rotated up to an optional position according to the positional relationship between the in-advance stored ID 11 and the notch or the orientation flat 15.;COPYRIGHT: (C)2010,JPO&INPIT