Production manner of the optical waveguide substrate which possesses the registration structure, and production manner of the photoelectricity air mixed loading substrate

摘要

In the optical waveguide substrate, and the photoelectricity air mixed loading substrate, at the same time with part reduction and process simplification high position precision the production possibility, optical waveguide and the registration structure, and production manner is provided in the optical terminal area of the substrate which uses that are offered at high yield rate. In the optical waveguide substrate, when the mirror component pattern is formed in optional position on clad layer 11, simultaneously, the pattern 14 for registration which possesses convex form in optional position of the mirror pattern 13 rim section is respectively formed, mirror pattern 13 is processed to taper condition. Next, the mask component when it registers with 100 which possesses the through hole in position of desire and the pattern 14 for registration with checking and verifying, the metal membrane is formed in inclined section 22 of mirror pattern and the pattern 14 surface for registration. Furthermore, pattern when 14 for registration and photo mask 16 is registered, on clad layer 11 where it adjoins with mirror pattern 13, wiring core pattern 20 is formed.