Electromagnetic radiation pulse width control device and electromagnetic radiation pulse width control method

摘要

PROBLEM TO BE SOLVED: To provide an apparatus and method that allow the pulse duration of a radiation beam to be extended without a corresponding loss in intensity.;SOLUTION: This apparatus and method is used for controlling electromagnetic radiation pulse duration in a lithographic apparatus. A splitting element is arranged to split an electromagnetic radiation pulse into a first portion and a second portion. A prism receives, refracts, and subsequently emits the first portion of the electromagnetic radiation pulse. A directing element is arranged to direct the first and second portions of the electromagnetic radiation pulse parallel to a common optical axis. The first portion combines with the second portion to form a combined radiation beam pulse. The combined radiation beam pulse has a longer pulse duration than the split electromagnetic pulse, but does not cause corresponding loss in intensity.;COPYRIGHT: (C)2009,JPO&INPIT