Pulse modulation high frequency power control method and pulse modulation high frequency power supply device

摘要

The pulse modulation high-frequency power control method includes an output amplitude control step for controlling the amplitude of the pulse output and a duty control step for controlling the duty ratio of the pulse output. In the output amplitude control step, the amplitude value of the pulse output is controlled, and constant amplitude control is performed so that the amplitude value becomes the set amplitude value. The constant amplitude control by the output amplitude control, for example, feeds back the amplitude value of the pulse output output by the power control, obtains a difference value between this feedback value and a preset amplitude value set in advance, and this difference value is The amplitude value of the pulse output is controlled so as to be zero.