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TEMPERATURE CONTROL SYSTEM AND METHOD FOR A CHAMBER OR PLATFORM AND TEMPERATURE-CONTROLLED CHAMBER OR PLATFORM INCLUDING THE TEMPERATURE CONTROL SYSTEM
TEMPERATURE CONTROL SYSTEM AND METHOD FOR A CHAMBER OR PLATFORM AND TEMPERATURE-CONTROLLED CHAMBER OR PLATFORM INCLUDING THE TEMPERATURE CONTROL SYSTEM
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机译:腔室或平台的温度控制系统和方法以及包括该温度控制系统的温度控制腔室或平台
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摘要
A temperature control system and method include a source of a temperature control medium that is to be introduced into a space. A fluid line conveys the temperature control medium from the source to the space, a first end of the fluid line being disposed in the space. An orifice assembly has an orifice through which the cooling medium flows toward the space. A size of the orifice is adjustable such that a rate of flow of the cooling medium entering the space is controllable.
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