MICRO-DOSING PUMP AND METHOD FOR PRODUCING A MICRO-DOSING PUMP

摘要

A micro-dosing pump includes a pump chamber substrate, a flexible membrane, a fluid line, a valve disk, a magnetizable actuator disk, and a drive unit. The pump chamber substrate has a pump chamber. The flexible membrane is on a first side of the pump chamber substrate and covers the pump chamber in a fluid-tight manner. The fluid line is on a second side of the pump chamber substrate such that fluid can enter and leave the pump chamber. The valve disk, arranged inside the pump chamber, has a fluid through-opening and is configured to close the fluid line by rotating and to open it via the through-opening. The actuator disk is coupled to the valve disk such that rotating the actuator disk rotates the valve disk. The drive unit has a pump plunger configured to move the membrane for suction or ejection of fluid and to rotate the actuator disk.