COHERENCE GRID -- INTERFEROMETER AND METHOD FOR A SPATIALLY RESOLVED OPTIC MEASUREMENT OF THE SURFACE GEOMETRY OF AN OBJECT

摘要

A coherence grid—interferometer for spatially resolved optic measurement of an object, with a light source, an interferometer, a path length—altering unit, and camera with a detection area. The interferometer cooperates with the light source and camera such that an outgoing beam is split into a measuring beam and a reference beam, the measuring beam is at least partially reflected by the object to the detection area of the camera and overlapped via a beam splitter with the reference beam such that the overlapped beams overlap the photo sensors in a planar fashion, and the optic path length—altering unit changes the optic path length of the measuring and/or reference beams. The path length—altering unit has a path scale and a path detector which detect a changing length of the optic path of the measuring and/or reference beams and the interferogram records are synchronized with the path measurement.