INSULATING-LAYER-CONTAINING CERAMIC MEMBER, METAL-MEMBER-CONTAINING CERAMIC MEMBER, CHARGED PARTICLE BEAM EMITTER, AND METHOD FOR PRODUCING INSULATING-LAYER-CONTAINING CERAMIC MEMBER

摘要

A ceramic member containing an insulating member is disclosed. The ceramic member comprises a ceramic body and an insulating layer on the ceramic body. The ceramic body contains aluminum oxide crystals and aluminum titanate crystals. The insulating layer contains silicon oxide as a main component. The ceramic body includes a first region that includes a first surface portion covered by the insulating layer, and a second region outside the first region, and having a surface resistivity of 1×10⁶ to 1×10⁹Ω/□. A surface resistivity of the first region is higher than the surface resistivity of the second region.