METAL BUFFER LAYER ASSISTED GUIDED MODE RESONANCE BIOSENSOR

摘要

A metal buffer layer assisted guided mode resonance (GMR) biosensor is disclosed. The GMR biosensor includes a substrate, a metal buffer layer and a waveguide layer. The metal buffer layer is disposed on the substrate and the waveguide layer is disposed on the metal buffer layer. The metal buffer layer, which is disposed adjacent to the waveguide layer, can carry out the total reflection and provide extra phase compensation of the total reflection at the same time. Accordingly, the propagation constant of the resonance wave would be much closer to the sensitivity of the phase, and the resonance electric field of the GMR biosensor would be much closer to the sensitive area. Consequently, the sensitivity of the GMR biosensor could be improved.