System for analyzing a low-pressure gas by optical emission spectroscopy

摘要

The object of the invention is a system for analyzing gases which are at a pressure on the order of a secondary vacuum. The system includes a gas ionization device that includes a cathode having conducting walls defining a cylindrical volume and a disc including at least one central through hole, an anode placed substantially at the center of the hole, a plasma source, the plasma being generated in the cylindrical volume by the combined action of an electric field and a magnetic field, orthogonal to the electric field, a system for collecting the light radiation emitted by the plasma, a cylindrical cavity coaxial to the anode having a conductance lower than that of the cylindrical volume and arranged between the ionization device and the collector system, and an analysis device for the ionized gases including an optical spectrometer for analyzing the evolution of the radiating spectrum. Preferably, the end of the cavity opposite the cylindrical volume is closed by a window that is transparent to the light radiation emitted by the plasma.