METHOD AND DEVICE FOR DEPOSITING THIN LAYERS, ESPECIALLY FOR THE PRODUCTION OF MULTIPLE LAYERS, NANOLAYERS, NANOSTRUCTURES AND NANOCOMPOSITES

摘要

The present disclosure relates to a method for the deposition of thin layers, particularly for producing multi-layer coatings, nanolayers, nanostructures and nanocomposites by laser deposition from target materials on a substrate surface, which is characterized by the following features: a) the target is divided into segments with materials having most differing physical and/or chemical properties; b) individual segments of said target are irradiated with an in each case different radiation intensity by means of a controlled energetic distribution of the focused laser energy via the laser beam cross section so that each target segment absorbs the quantity of laser energy during the irradiation, which is required to evaporate or desorb the target material present in the respective segment.