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Photoelectric conversion apparatus and imaging system using the photoelectric conversion apparatus having an optical black pixel region with a light shielding film and a titanium film above a plug
Photoelectric conversion apparatus and imaging system using the photoelectric conversion apparatus having an optical black pixel region with a light shielding film and a titanium film above a plug
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机译:光电转换装置和使用该光电转换装置的成像系统,其光学黑色像素区域在插头上方具有遮光膜和钛膜
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摘要
A photoelectric conversion apparatus includes an effective pixel region for outputting a signal according to light, and an optical black pixel region for outputting a reference signal, wherein, in the optical black pixel region, a plug is arranged in an insulating film, and a light shielding film is arranged above the plug and is connected to the plug, such that an upper surface of the plug and an upper surface of the insulating film form the same plane, and wherein, above or below the light shielding film, a titanium film of thickness 5 to 15 nm is arranged.
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