Method for inspecting defect of article to be inspected

摘要

A method of inspecting defects in an inspection target includes (1) a step of supplying a particle-containing gas to one end face of the inspection target under pressure, applying in parallel a first laser beam to the vicinity of the other end face of the inspection target, and photographing such end face from a position vertical to such end face, (2) a step of supplying a particle-containing gas to the one end face of the inspection target under pressure, applying in parallel a second laser beam to the vicinity of the other end face of the inspection target, and photographing such end face from a position vertical to such end face, and (3) a step of specifying defects in the inspection target from photographic results obtained by the steps (1) and (2).