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Method for manufacturing 3-dimensional structures using thin film with columnar nano pores and manufacture thereof
Method for manufacturing 3-dimensional structures using thin film with columnar nano pores and manufacture thereof
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机译:使用具有柱状纳米孔的薄膜制造三维结构的方法及其制造
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摘要
Disclosed is a method for manufacturing 3-dimensional structure using a thin film with a columnar nano pores and a manufacture thereof. A method for packaging an MEMS device or an NEMS device in accordance with an embodiment of the present invention includes: forming a sacrificial layer; forming a thin film having columnar nano pores formed therein by depositing one of a metallic material, an oxide, a nitride and a fluoride on the sacrificial layer; forming a support layer on the thin film and patterning the support layer; removing the sacrificial layer through use of the nano pores of the thin film parts of which are exposed by patterning the support layer; and forming a shielding layer on the thin film and the support layer.
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