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Directional solidification furnace for reducing melt contamination and reducing wafer contamination
Directional solidification furnace for reducing melt contamination and reducing wafer contamination
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机译:定向凝固炉可减少熔体污染并减少晶片污染
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摘要
A directional solidification furnace includes a crucible for holding molten silicon and a lid covering the crucible and forming an enclosure over the molten silicon. The crucible also includes an inlet in the lid for introducing inert gas above the molten silicon to inhibit contamination of the molten silicon.
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