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Resonator device including electrode with buried temperature compensating layer
Resonator device including electrode with buried temperature compensating layer
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机译:包括具有埋入的温度补偿层的电极的谐振器装置
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摘要
An acoustic resonator device includes a composite first electrode on a substrate, a piezoelectric layer on the composite electrode, and a second electrode on the piezoelectric layer. The first electrode includes a buried temperature compensating layer having a positive temperature coefficient. The piezoelectric layer has a negative temperature coefficient, and thus the positive temperature coefficient of the temperature compensating layer offsets at least a portion of the negative temperature coefficient of the piezoelectric layer.
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