Near-infrared absorbing dye, near-infrared absorptive film-forming composition, and near-infrared absorptive film

摘要

A near-infrared absorbing dye has an anion of formula (1) wherein A¹ is H or CF₃, R⁰ is OH or —OC(═O)—R′, and R′ is a monovalent hydrocarbon group. The dye has excellent solvent solubility as well as good optical properties and heat resistance, offering the advantages of easy coating and effective working during film formation. The dye free of heavy metal in its structure is advantageously used in the process of fabricating semiconductor devices.;