Enhanced OVL dummy field enabling “on-the-fly” OVL measurement methods
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机译:增强的OVL虚拟字段,支持“即时” OVL测量方法
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摘要
A semiconductor wafer may include a dummy field configured to enable overlay measurements. The enhanced dummy field may include a plurality of encoding blocs that enable OVL measurements to be made throughout the enhanced dummy field.
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