首页> 外国专利> METHOD FOR IN-VACUUM MAKING MULTIPLE TRIBOLOGICAL THIN LAYERS, WITH COMPLEMENTARY CUMULATIVE PROPERTIES, BY 'PHYSICAL VAPOR DEPOSITION' () OR 'IONIZED PHYSICAL VAPOR DEPOSITION' () TYPE METHOD

METHOD FOR IN-VACUUM MAKING MULTIPLE TRIBOLOGICAL THIN LAYERS, WITH COMPLEMENTARY CUMULATIVE PROPERTIES, BY 'PHYSICAL VAPOR DEPOSITION' () OR 'IONIZED PHYSICAL VAPOR DEPOSITION' () TYPE METHOD

机译:通过“物理蒸气沉积”()或“电离的物理蒸气沉积”()类型的方法在真空中制造具有互补累积特性的多个摩擦学薄层的方法

摘要

The invention relates to a material with multiple coating layers and to a process for in-vacuum obtaining the same, used for making the vacuum depositions of the multiple thin layers, for improving the tribological properties of the metal parts subjected to friction which causes by wear, noises and exaggerated heating, which leads to their premature damaging. According to the invention, the material comprises 4 layers with individual thicknesses of 100 nmh125 nm and total thickness of 0.6 μ m H5 μ m, obtained by magnetron-type deposition in a single technological working cycle, each layer consisting of: hard materials, which are incompressible and have Vickers micro-hardness higher than 10 GPa or super-hard which are super-incompressible and have Vickers micro-hardness higher than 40 GPa and which show covalent chemical bond, for an initial layer (1); materials with high compressibility and tenacity, properties which provide the storage of the energy to which the tribological thin layers are subjected, for another layer (2); materials with ionic bond with properties of high thermal and chemical stability, for an intermediary layer (3); or materials with an as low as possible friction coefficient, especially dry lubricant materials, with very low friction coefficient, for a final layer (4).
机译:本发明涉及一种具有多层涂层的材料及其在真空中获得该涂层的方法,该方法用于对多层薄层进行真空沉积,以改善遭受磨损引起的摩擦的金属零件的摩擦学性能。 ,噪音和过度加热,导致其过早损坏。根据本发明,该材料包括4层,其各自的厚度为100nm <h <125nm,总厚度为0.6μm。 m <H <5μ; m,是通过磁控管型沉积在单个技术工作周期中获得的,每一层包括:不可压缩且维氏显微硬度高于10 GPa的硬质材料,或超压缩且具有维氏显微材料的超硬材料初始层(1)的硬度高于40 GPa并且显示共价化学键;具有高可压缩性和韧性的材料,用于为另一层(2)提供摩擦学薄层所经受的能量存储;具有离子键并具有高热稳定性和化学稳定性的材料,用于中间层(3);或摩擦系数尽可能低的材料,特别是摩擦系数非常低的干润滑剂材料,用于最终层(4)。

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