AIR BEARING, AIR FLOATATION MOTION SYSTEM AND METHOD FOR STABILIZING THE INNER SHAFT OF THE AIR BEARING

摘要

Disclosed is an air bearing (100), which bearing (100) comprises an air bearing body (120) and a rotation shaft (140) located within the air bearing body (120), with the rotation shaft (140) containing a cylindrical shaft portion (142) and a flange portion (144) being perpendicular to the axis of the rotation shaft (140), and several gas-guiding holes (122) provided on the air bearing body (120). When the rotation shaft (140) is in a dynamic state, the gas flowing through the gas-guiding holes (122) forms a gas film between the rotation shaft (140) and the air bearing body (120); and when the rotation shaft (140) is in a static state, the gas flowing through the gas-guiding holes (122) provides an axial force to make part of the surface of the flange portion (144) contact closely with the air bearing body (120). When the rotation shaft of the air bearing in the present invention is in a static state, the rotation shaft closely contacts with the air bearing body by using air, such that the rotation shaft can be in a very stable state. At this time, either observation operations or other processing operations can achieve a good effect.