SINGLE WAVELENGTH STIMULATED EMISSION DEPLETION MICROSCOPY

摘要

An apparatus for superresolution microscopy or microlithography, wherein a spot in the specimen (15) to be examined or in the microlithographic medium (15) is raised to an excited state by a first pulse (3) of light, and a second pulse (3') of light reduces th excitation in the peripheral parts of the spot to increase the resolution of the instrument, wherein the wavelength of the second pul (31) in the specimen or the medium (15) is the same as the first pulse (3).