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COMPOSITE BODY AND METHOD FOR PRODUCING SAME, DIELECTRIC MATERIAL, PIEZOELECTRIC MATERIAL, CAPACITOR, PIEZOELECTRIC ELEMENT AND ELECTRONIC DEVICE
COMPOSITE BODY AND METHOD FOR PRODUCING SAME, DIELECTRIC MATERIAL, PIEZOELECTRIC MATERIAL, CAPACITOR, PIEZOELECTRIC ELEMENT AND ELECTRONIC DEVICE
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机译:用于制造相同,介电材料,压电材料,电容器,压电元件和电子设备的复合体和方法
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摘要
The invention discloses a kind of complex oxide films that produces with high relative dielectric constant, thickness and high voltage is arbitrarily controlled, without complicated huge tool, this composite oxide film. It also discloses comprising this composite oxides film composite, a kind of this species complex of manufacture, dielectric material or piezoelectric material include above-mentioned complex oxide film or complex, capacitor contains the capacitor or piezoelectric element of complex oxide film, be conducive to improve pressure resistance in this way, electronic device includes such capacitor or piezoelectric element. Specifically disclose a kind of surface by forming the substrate that metal oxide film contains titanium elements of complex oxide film and strontium element containing titanium elements and pass through anodic oxidation etc.), their reaction solutions and metal-oxide film containing strontium ion. It is also specifically disclosed that a kind of capacitor includes that complex has this complex oxide film as dielectric material, and piezoelectric element includes that complex has such complex oxide film as piezoelectric material.
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