LINEAR MAGNETIC POSITION SENSOR WITH IMPROVED LINEARITY OF THE OUTPUT CHARACTERISTIC CURVE

摘要

The present invention relates to a non-contact position sensor (100), in particular to a linear magnetic position sensor with a field probe (108) to create a sensor signal in response to a geometric position of a magnetic indicator element in relation to this field probe. Furthermore, the present invention relates to a vacuum actuator with a flexible membrane, which is arranged between two pressure reservoirs and the position of which is monitored by a non-contact position sensor. In order to specify a simply and robustly constructed linear magnetic position sensor, which exhibits an improved linearity in its output characteristic curve, the indicator element (102) is formed by a substantially tubular permanent magnet, which is movable in a direction along a longitudinal axis of the tube, and the position sensor has at least two ferromagnetic flux carrying members (112, 114), which are arranged along the longitudinal axis inside the tubular permanent magnet (102) and define an air gap (110), in which the field probe (108) is arranged.