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CHIP FOR CELL ELECTROPHYSIOLOGY SENSOR, CELL ELECTROPHYSIOLOGY SENSOR USING SAME, AND PRODUCTION METHOD OF CHIP FOR CELL ELECTROPHYSIOLOGY SENSOR
CHIP FOR CELL ELECTROPHYSIOLOGY SENSOR, CELL ELECTROPHYSIOLOGY SENSOR USING SAME, AND PRODUCTION METHOD OF CHIP FOR CELL ELECTROPHYSIOLOGY SENSOR
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机译:细胞电生理传感器芯片,使用其的细胞电生理传感器以及细胞电生理传感器芯片的生产方法
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摘要
A cellular electrophysiology sensor is adapted to measure an electrical change of a test cell. A chip for the sensor includes a diaphragm, and a thermally-oxidized film mainly containing silicon dioxide on the diaphragm. The diaphragm includes a silicon layer and a silicon dioxide layer on an upper surface of the silicon layer. A through-hole passing through the silicon layer and the silicon dioxide layer is formed. The through-hole has an opening which opens at the silicon dioxide layer and is adapted to capture the test cell. The thermally-oxidized film is provided on an inner wall surface of the through-hole, and unified with the silicon dioxide layer at the opening of the through-hole. This cellular electrophysiology sensor chip can stably capture the test cell and provides a gigaseal stably even if test cells have different properties,
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