首页> 外国专利> STRUCTURED ILLUMINATION DEVICE, ADJUSTMENT METHOD FOR SAID STRUCTURED ILLUMINATION DEVICE, COMPUTER EXECUTABLE ADJUSTMENT PROGRAM, STRUCTURED ILLUMINATION MICROSCOPE DEVICE, AND SURFACE SHAPE MEASURING DEVICE

STRUCTURED ILLUMINATION DEVICE, ADJUSTMENT METHOD FOR SAID STRUCTURED ILLUMINATION DEVICE, COMPUTER EXECUTABLE ADJUSTMENT PROGRAM, STRUCTURED ILLUMINATION MICROSCOPE DEVICE, AND SURFACE SHAPE MEASURING DEVICE

机译:结构化照明设备,所述结构化照明设备的调整方法,计算机可执行调整程序,结构化照明显微镜设备和表面形状测量设备

摘要

To increase the speed of illumination pattern switching, this structured illumination device is provided with: an optical modulator (3) disposed within luminous flux output by a light source (11) and having a sound wave propagation path in a transverse direction to that output luminous flux; a drive unit (19) that gives rise to standing waves for sound waves within the sound wave propagation path by applying a drive signal for vibrating a sound wave propagation path medium to the optical modulator; illumination light systems (4, 6, 7, 9) that make diffraction components that differ from each other in the output luminous flux passing through the sound wave propagation path interfere, and form the interference fringes thereof on an article to be observed (10); and adjustment units (90, 19) that adjust parameters for the drive unit such that the state of the interference fringes is a prescribed state.
机译:为了提高照明图案切换的速度,该结构照明装置具有:光学调制器(3),其布置在由光源(11)输出的光通量内,并且在与所输出的光的横向上具有声波传播路径。通量驱动单元(19),通过将用于使声波传播路径介质振动的驱动信号施加到光调制器,从而在声波传播路径内产生声波的驻波。使衍射分量在通过声波传播路径的输出光束中互不相同的照明光系统(4、6、7、9)发生干涉,并在被观察物上形成干涉条纹(10) ;调节单元(90、19),其调节驱动单元的参数,使得干涉条纹的状态为规定状态。

著录项

  • 公开/公告号WO2013080542A1

    专利类型

  • 公开/公告日2013-06-06

    原文格式PDF

  • 申请/专利权人 NIKON CORPORATION;

    申请/专利号WO2012JP07645

  • 发明设计人 NOMURA TATSUSHI;OSAWA HISAO;

    申请日2012-11-28

  • 分类号G02B21/06;

  • 国家 WO

  • 入库时间 2022-08-21 16:32:44

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