METHOD FOR THE PHASE BALANCING OF SEVERAL HF POWER GENERATING UNITS OF AN HF POWER SUPPLY SYSTEM, AND POWER SUPPLY SYSTEM

摘要

The invention relates to a method for the phase balancing of several HF power generating units (12-14) of an HF power supply system (10), comprising the following method steps: a. measuring a signal that is related to the power reflected at a load and arriving at a first HF power generating unit (12-14); b. transmitting at least one value related to the measured signal to a system controller (11) or transmitting the measured signal to a system controller (11) and determining a value related to the measured signal in the system controller (11); c. determining a reference value for the value of the first HF power generating unit (12-14) in the system controller (11) or specifying a reference value for the value of the first HF power generating unit (12-14) to the system controller (11); d. changing the frequency and/or the phase of the output signal of the first HF power generating unit (12-14); e. measuring again a signal that is related to the power reflected at a load and arriving at the first HF power generating unit (12-14); f. transmitting a value related to the signal measured in step e. to the system controller (11) or transmitting the signal measured in step e. to the system controller (11) and determining a value related to the signal measured in step e. in the system controller (11); and g. repeating steps c. to f. or d. to f. until a specified result occurs, wherein h. steps 1.a. to 1.g. are performed for one or more additional load generating units (12-14).