WAVELENGTH SCANNING INTERFEROMETER FOR ASPHERIC MEASUREMENTS AND APPLICATION METHOD THEREFOR

摘要

Disclosed is a wavelength scanning interferometer for aspheric measurements, comprising a set of tunable lasers (7) as a light source, a Tyman-Green interferometer for generating interference fringes, a translating stage (1) for scanning the optical path difference along an optical axis, a graphic card (11) for converting interferometric data into digital signals and transferring same to a computer (12), and a data card (13) for synchronizing the actions of a CCD camera (9) and the translating stage (1). The interferometer differs from conventional aspheric measurement methods in that it can measure a surface or wave front having a large asphericity without null lens compensation. Further provided is an application method of the wavelength scanning interferometer for aspheric measurements, which method does not need a complicated and generally expensive stage for multi-dimensional movement.