COOLING ARRANGEMENT FOR A GAS LASER, GAS LASER COMPRISING SAME, AND METHOD FOR COOLING LASER GAS

摘要

The invention relates to a cooling arrangement (16) for cooling laser gas for a gas laser, comprising: a first cooling circuit (21) having a first cooling unit (17) and having at least one first heat exchanger (26) for cooling laser gas that flows from a blower (11) to a resonator (2) of the gas laser, and a second cooling circuit (22) which is independent of the first cooling circuit and which has a second cooling unit (18) and at least one second heat exchanger (27) for cooling laser gas that flows from the resonator (2) to the blower (11). In the cooling arrangement (16), the second cooling circuit (22) has at least one further heat exchanger (28) for additionally cooling the laser gas that flows from the blower (11) to the resonator (2). The invention also relates to a gas laser comprising a cooling arrangement (16) of this kind, and a corresponding method for cooling laser gas for a gas laser.